PLASMA EQUIPMENT
| Technique | Type of apparatus |
Partner name, Contact person Expertise of the personel |
Types of possible experiments |
| Plasma equipment (MPA/CVD) | INSTM Prof. J.M. Kenny |
- Carbon film deposition and surface treatments, spin coating and thermal evaporator for thin film deposition. | |
| Plasma system | Plasma system Atto (Diener Electronic) |
TUL Dr Ireneusz Glowacki Tel.: +48 426313205 |
- Process development, surface cleaning, activating, etching |
